Because of the different melting point, it is difficult to doped Ag element in ZnO film. Ag dopant can adjust the properties of ZnO materials. In this paper, we deposited Ag doped ZnO film using two step vapour evaporation method on c-plane sapphire substrate. The SEM image shows that the doped film was composed of small grain which compact in order and the Ag microwires was dispersed on the surface. The EDX graph proves that the Ag was indeed in the film. The XRD pattern reveals that the doped film has prefer orientation along the c-axis with wurtzite structure and the dopants have not effect the crystal quality.
