تقرير
Superconducting cavity-electromechanics on silicon-on-insulator
| العنوان: | Superconducting cavity-electromechanics on silicon-on-insulator |
|---|---|
| المؤلفون: | Dieterle, Paul B., Kalaee, Mahmoud, Fink, Johannes, Painter, Oskar |
| سنة النشر: | 2016 |
| المجموعة: | Condensed Matter Quantum Physics |
| مصطلحات موضوعية: | Quantum Physics, Condensed Matter - Mesoscale and Nanoscale Physics |
| الوصف: | Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this fabrication process, a high-impedance $8.9$GHz coil resonator is coupled capacitively with large participation ratio to a $9.7$MHz micromechanical resonator. Two-tone microwave spectroscopy and radiation pressure back-action are used to characterize the coupled system in a dilution refrigerator down to temperatures of $T_f = 11$~mK, yielding a measured electromechanical vacuum coupling rate of $g_{0}/2\pi \approx 24.6$~Hz and a mechanical resonator $Q$-factor of $Q_{m}=1.7\times 10^7$. Microwave back-action cooling of the mechanical resonator is also studied, with a minimum phonon occupancy of $n_{m} \approx 16$ phonons being realized at an elevated fridge temperature of $T_f = 211$~mK. Comment: 8 pages, 5 figures |
| نوع الوثيقة: | Working Paper |
| URL الوصول: | http://arxiv.org/abs/1601.04019 |
| رقم الأكسشن: | edsarx.1601.04019 |
| قاعدة البيانات: | arXiv |
| الوصف غير متاح. |