تقرير
Plasma Stratification in Radio-Frequency Discharges of Noble Gases
| العنوان: | Plasma Stratification in Radio-Frequency Discharges of Noble Gases |
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| المؤلفون: | Kolobov, Vladimir I, Arslanbekov, Robert R, Levko, Dmitry, Godyak, Valery A |
| سنة النشر: | 2020 |
| المجموعة: | Physics (Other) |
| مصطلحات موضوعية: | Physics - Computational Physics, Physics - Plasma Physics |
| الوصف: | We conducted experimental studies and computer simulations of standing striations in capacitive coupled plasma in Argon gas. Standing striations were observed at frequencies 3.6, 8.4 and 19.0 MHz, in a pressure range 0.05-10 Torr, tube radius R=1.1 cm, for a certain range of discharge currents (plasma densities). Numerical simulations revealed similar nature of standing striations in CCP and moving striations in DC discharges under similar discharge conditions. Comparison of computer simulations with experimental observations helped clarify the nature of these striations. The non-linear dependence of the ionization rate on electron density is shown to be the main underlying mechanism of the stratification phenomena. |
| نوع الوثيقة: | Working Paper |
| DOI: | 10.1088/1361-6463/ab7ca0 |
| URL الوصول: | http://arxiv.org/abs/2001.04874 |
| رقم الأكسشن: | edsarx.2001.04874 |
| قاعدة البيانات: | arXiv |
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