Heterogeneous integration of single InAs/InP quantum dots with the SOI chip using direct bonding

التفاصيل البيبلوغرافية
العنوان: Heterogeneous integration of single InAs/InP quantum dots with the SOI chip using direct bonding
المؤلفون: Burakowski, Marek, Holewa, Paweł, Sakanas, Aurimas, Musiał, Anna, Sęk, Grzegorz, Mrowiński, Paweł, Yvind, Kresten, Semenova, Elizaveta, Syperek, Marcin
المصدر: Optics Express 32, 7, 10874-10886 (2024)
سنة النشر: 2023
المجموعة: Condensed Matter
Physics (Other)
مصطلحات موضوعية: Physics - Optics, Condensed Matter - Mesoscale and Nanoscale Physics
الوصف: Quantum information processing with photons in small-footprint and highly integrated silicon-based photonic chips requires incorporating non-classical light sources. In this respect, self-assembled III-V semiconductor quantum dots (QDs) are an attractive solution, however, they must be combined with the silicon platform. Here, by utilizing the large-area direct bonding technique, we demonstrate the hybridization of InP and SOI chips, which allows for coupling single photons to the SOI chip interior, offering cost-effective scalability in setting up a multi-source environment for quantum photonic chips. We fabricate devices consisting of self-assembled InAs QDs embedded in the tapered InP waveguide (WG) positioned over the SOI-defined Si WG. Focusing on devices generating light in the telecom C-band compatible with the low-loss optical fiber networks, we demonstrate the light coupling between InP and SOI platforms by observing photons outcoupled at the InP-made circular Bragg grating outcoupler fabricated at the end of an 80 $\mu$m-long Si WG, and at the cleaved edge of the Si WG. Finally, for a device with suppressed multi-photon generation events exhibiting 80% single photon generation purity, we measure the photon number outcoupled at the cleaved facet of the Si WG. We estimate the directional on-chip photon coupling between the source and the Si WG to 5.1%.
نوع الوثيقة: Working Paper
DOI: 10.1364/OE.515223
URL الوصول: http://arxiv.org/abs/2311.13961
رقم الأكسشن: edsarx.2311.13961
قاعدة البيانات: arXiv