دورية أكاديمية

Comparative study on the dynamics and the composition between a pulsed laser deposition (PLD) and a plasma enhanced PLD (PE-PLD)

التفاصيل البيبلوغرافية
العنوان: Comparative study on the dynamics and the composition between a pulsed laser deposition (PLD) and a plasma enhanced PLD (PE-PLD)
المؤلفون: M. Escalona, H. Bhuyan, J.C. Valenzuela, S. Ibacache, E. Wyndham, M. Favre, F. Veloso, H.M. Ruiz, E. Wagenaars
المصدر: Results in Physics, Vol 24, Iss , Pp 104066- (2021)
بيانات النشر: Elsevier, 2021.
سنة النشر: 2021
المجموعة: LCC:Physics
مصطلحات موضوعية: Titanium nitride, Plasma-enhanced pulsed laser deposition, Dual radio-frequency plasma, Thin film, Optical spectroscopy, Interferometry, Physics, QC1-999
الوصف: We report the effect of single and dual radio frequency (RF) plasma discharge on the composition and dynamics of a titanium plasma plume produced in a plasma-enhanced pulsed laser deposition (PE-PLD) system. The study was carried out in a nitrogen environment at different pressures. Time-resolved images, optical emission spectroscopy, and interferometry were employed to analyze the plasma. We were able to fit time-resolved images using different expansion models, obtained an expansion velocity between 6 and 30 × 103 m/s. Emission lines from N II, Ti II, were observed by changing the pressure and RF conditions. An increase in emission line intensity from N II was observed by increasing the pressure and RF power. We used Ti II lines to estimate the plasma temperature by using the Boltzmann equation, and we obtained the density from the Ti II line (454.9 nm) through Stark broadening. In addition, a Mach-Zehnder interferometer was employed to make a two-dimensional map of the electron density at early times. The estimated temperatures and densities are between 0.8 and 2.0 eV and 1017 – 1018 cm−3, respectively. The results suggest that increasing RF power enhanced the Ti-N atoms interaction, which is crucial in titanium nitride film applications.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 2211-3797
Relation: http://www.sciencedirect.com/science/article/pii/S2211379721002278; https://doaj.org/toc/2211-3797
DOI: 10.1016/j.rinp.2021.104066
URL الوصول: https://doaj.org/article/4ab69adff10d46fca96ee70771027bd6
رقم الأكسشن: edsdoj.4ab69adff10d46fca96ee70771027bd6
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:22113797
DOI:10.1016/j.rinp.2021.104066