دورية أكاديمية
Effects of Thermal Annealing on the Properties of Zirconium-Doped MgxZn1−XO Films Obtained through Radio-Frequency Magnetron Sputtering
| العنوان: | Effects of Thermal Annealing on the Properties of Zirconium-Doped MgxZn1−XO Films Obtained through Radio-Frequency Magnetron Sputtering |
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| المؤلفون: | Wen-Yen Lin, Feng-Tsun Chien, Hsien-Chin Chiu, Jinn-Kong Sheu, Kuang-Po Hsueh |
| المصدر: | Membranes, Vol 11, Iss 5, p 373 (2021) |
| بيانات النشر: | MDPI AG, 2021. |
| سنة النشر: | 2021 |
| المجموعة: | LCC:Chemical technology LCC:Chemical engineering |
| مصطلحات موضوعية: | ZrO2, MgZnO, ZnO, MgO, thin film transistor, radio-frequency magnetron sputtering, Chemical technology, TP1-1185, Chemical engineering, TP155-156 |
| الوصف: | Zirconium-doped MgxZn1−xO (Zr-doped MZO) mixed-oxide films were investigated, and the temperature sensitivity of their electric and optical properties was characterized. Zr-doped MZO films were deposited through radio-frequency magnetron sputtering using a 4-inch ZnO/MgO/ZrO2 (75/20/5 wt%) target. Hall measurement, X-ray diffraction (XRD), transmittance, and X-ray photoelectron spectroscopy (XPS) data were obtained. The lowest sheet resistance, highest mobility, and highest concentration were 1.30 × 103 Ω/sq, 4.46 cm2/Vs, and 7.28 × 1019 cm−3, respectively. The XRD spectra of the as-grown and annealed Zr-doped MZO films contained MgxZn1−xO(002) and ZrO2(200) coupled with Mg(OH)2(101) at 34.49°, 34.88°, and 38.017°, respectively. The intensity of the XRD peak near 34.88° decreased with temperature because the films that segregated Zr4+ from ZrO2(200) increased. The absorption edges of the films were at approximately 348 nm under 80% transmittance because of the Mg content. XPS revealed that the amount of Zr4+ increased with the annealing temperature. Zr is a potentially promising double donor, providing up to two extra free electrons per ion when used in place of Zn2+. |
| نوع الوثيقة: | article |
| وصف الملف: | electronic resource |
| اللغة: | English |
| تدمد: | 11050373 2077-0375 |
| Relation: | https://www.mdpi.com/2077-0375/11/5/373; https://doaj.org/toc/2077-0375 |
| DOI: | 10.3390/membranes11050373 |
| URL الوصول: | https://doaj.org/article/5a751a8b32b04314a3eae1a77cde0705 |
| رقم الأكسشن: | edsdoj.5a751a8b32b04314a3eae1a77cde0705 |
| قاعدة البيانات: | Directory of Open Access Journals |
Full Text Finder | تدمد: | 11050373 20770375 |
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| DOI: | 10.3390/membranes11050373 |