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Research on Subsurface Damage Measurement of Fused Silica in Ultra-Precision Grinding Based on Laser Damage Performance

التفاصيل البيبلوغرافية
العنوان: Research on Subsurface Damage Measurement of Fused Silica in Ultra-Precision Grinding Based on Laser Damage Performance
المؤلفون: Yaoyu Zhong, Mingjin Xu, Wenjun Kuang, Fubin Wan, Zhifan Lin, Yansong Fan, Qingqing Hu, Fufang Xu
المصدر: Applied Sciences, Vol 14, Iss 13, p 5379 (2024)
بيانات النشر: MDPI AG, 2024.
سنة النشر: 2024
المجموعة: LCC:Technology
LCC:Engineering (General). Civil engineering (General)
LCC:Biology (General)
LCC:Physics
LCC:Chemistry
مصطلحات موضوعية: ultra-precision grinding, subsurface damage, fused silica, damage precursor multimodal measurement, Technology, Engineering (General). Civil engineering (General), TA1-2040, Biology (General), QH301-705.5, Physics, QC1-999, Chemistry, QD1-999
الوصف: In order to achieve accurate prediction of subsurface damage (SSD) in ultra-precision grinding of high-performance ultra-violet laser-irradiated fused silica optics, the paper combines damage precursor multimodal measurement technology with magnetorheological finishing spot method detection. Various methods such as photothermal weak absorption and fluorescence confocal imaging are used for measuring the surface roughness and subsurface damage depth of a series of fused silica samples prepared under different ultra-precision grinding parameters. The correlation between surface roughness and subsurface damage depth in ultra-precision grinding based on laser damage performance is established using curve fitting. The results indicate that there is a metamorphic layer below the subsurface crack layer, which can cause additional photothermal absorption. Subsurface damage is constituted of the subsurface crack layer and metamorphic layer. Under ultra-precision grinding conditions, the maximum depth of subsurface damage is generally 2.00–4.22 times the depth of the subsurface damage cluster. The roughness Ra and the subsurface damage cluster depth correspond to SSD(cluster) = 195 × Ra − 0.13. The maximum depth of subsurface damage can be predicted by measuring the Ra value, by which accurate prediction of defect depth in ultra-precision grinding and guiding the high-performance manufacturing of ultra-violet laser-irradiated fused silica optics can be achieved.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 2076-3417
Relation: https://www.mdpi.com/2076-3417/14/13/5379; https://doaj.org/toc/2076-3417
DOI: 10.3390/app14135379
URL الوصول: https://doaj.org/article/6ee6fd357de4479a9173ebbfcf0a10c0
رقم الأكسشن: edsdoj.6ee6fd357de4479a9173ebbfcf0a10c0
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:20763417
DOI:10.3390/app14135379