Impedance-type humidity sensors based on EuCl2, Eu2O3 and EuCl2/Eu2O3 blend films were fabricated. The electrical properties of the pure EuCl2 and Eu2O3 films and EuCl2/Eu2O3 blend film that was blended with different amounts of EuCl2 were investigated as functions of relative humidity. The influences of the EuCl2 to the humidity-sensing properties (sensitivity and linearity) of the EuCl2/Eu2O3 blend film were thus elucidated. The impedance-type humidity sensor that was made of a 7 wt% EuCl2/Eu2O3 blend film exhibited the highest sensitivity, best linearity, a small hysteresis, a fast response time, a small temperature coefficient and long-term stability. The complex impedance plots were used to elucidate the role of ions in the humidity-sensing behavior of the EuCl2/Eu2O3 blend film.
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