Concept for Manufacturing a Microoptoelectromechanical Micro-G Accelerometer

التفاصيل البيبلوغرافية
العنوان: Concept for Manufacturing a Microoptoelectromechanical Micro-G Accelerometer
المؤلفون: Barbin, Evgenij S., Nesterenko, Tamara G., Koleda, Aleksej N., Shesterikov, Evgeniy V., Kulinich, Ivan V., Kokolov, Andrey
المصدر: 2022 International Siberian Conference on Control and Communications (SIBCON) Control and Communications (SIBCON), 2022 International Siberian Conference on. :1-5 Nov, 2022
Relation: 2022 International Siberian Conference on Control and Communications (SIBCON)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665476287
تدمد:23806516
DOI:10.1109/SIBCON56144.2022.10002971