مؤتمر
Effect of water film on 4H-SiC nano-indentation process
| العنوان: | Effect of water film on 4H-SiC nano-indentation process |
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| المؤلفون: | Zhou, Yuqi, Huang, Yuhua, Li, Jinming, Zhu, Fulong |
| المصدر: | 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC) Electronics Packaging Technology Conference (EPTC), 2022 IEEE 24th. :481-485 Dec, 2022 |
| Relation: | 2022 IEEE 24th Electronics Packaging Technology Conference (EPTC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9798350398854 9798350398847 |
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| DOI: | 10.1109/EPTC56328.2022.10013179 |