مؤتمر
In-line electrical characterization of ultrathin gate dielectric films
| العنوان: | In-line electrical characterization of ultrathin gate dielectric films |
|---|---|
| المؤلفون: | Cubaynes, F., Passefort, S., Eason, K., Xiafang Zhang, Date, L., Pique, D., Conard, T., Rothschild, A., Schaekers, M. |
| المصدر: | 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) Advanced semiconductor manufacturing Advanced Semiconductor Manufacturing 2002 IEEE/SEMI Conference and Workshop. :1-5 2002 |
| Relation: | 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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