التفاصيل البيبلوغرافية
العنوان: |
Ultra High Temperature Saw Sensors Based on Signle Crystalline AlN and Multilayer Composite Electrode |
المؤلفون: |
Zhang, Yihong, Xuan, Weipeng, Zhu, Daiqing, Dong, Shurong, Jin, Hao, Luo, Jikui |
المصدر: |
2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2022 16th Symposium on. :780-783 Oct, 2022 |
Relation: |
2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) |
قاعدة البيانات: |
IEEE Xplore Digital Library |