Ultra High Temperature Saw Sensors Based on Signle Crystalline AlN and Multilayer Composite Electrode

التفاصيل البيبلوغرافية
العنوان: Ultra High Temperature Saw Sensors Based on Signle Crystalline AlN and Multilayer Composite Electrode
المؤلفون: Zhang, Yihong, Xuan, Weipeng, Zhu, Daiqing, Dong, Shurong, Jin, Hao, Luo, Jikui
المصدر: 2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2022 16th Symposium on. :780-783 Oct, 2022
Relation: 2022 16th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350320800
DOI:10.1109/SPAWDA56268.2022.10045964