CMOS-Embedded 3D Micro/Nanofluidics Employing Top-Down Beol Single-Step Wet-Etching Technique

التفاصيل البيبلوغرافية
العنوان:	CMOS-Embedded 3D Micro/Nanofluidics Employing Top-Down Beol Single-Step Wet-Etching Technique
المؤلفون:	Weng, Wei-Yang, Hou, Hung-Yu, Chao, Yueh-Jung, Liaw, Shwu-Jen, Chien, Jun-Chau
المصدر:	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :558-561 Jan, 2023
Relation:	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات:	IEEE Xplore Digital Library