Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time Monitoring

التفاصيل البيبلوغرافية
العنوان: Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time Monitoring
المؤلفون: Hoffmann, Martin, Schmitt, Philip, Wittemeier, Steffen, Schaller, Falk, Shaporin, Alexey, Stockel, Chris, Geneis, Volker, Forke, Roman, Hedayat, Christian, Hilleringmann, Ulrich, Kuhn, Harald, Zimmermann, Sven
المصدر: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2023 IEEE 36th International Conference on. :522-525 Jan, 2023
Relation: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665493086
تدمد:21601968
DOI:10.1109/MEMS49605.2023.10052634