Back-End-of-Line-Compatible Anneal-Free Ferroelectric Field-Effect Transistor

التفاصيل البيبلوغرافية
العنوان: Back-End-of-Line-Compatible Anneal-Free Ferroelectric Field-Effect Transistor
المؤلفون: Tsai, Shih-Hao, Li, Zhonghua, Mo Ei Phyu, Ma Mo, Fang, Zihang, Hooda, Sonu, Chen, Chun-Kuei, Zamburg, Evgeny, Thean, Aaron Voon-Yew
المصدر: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2023 7th IEEE. :1-3 Mar, 2023
Relation: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350332520
DOI:10.1109/EDTM55494.2023.10103049