مؤتمر
Selective ALD Mo Deposition in 10nm Contacts
| العنوان: | Selective ALD Mo Deposition in 10nm Contacts |
|---|---|
| المؤلفون: | van der Veen, Marleen H., Maes, J. W., Pedreira, O. Varela, Zhu, C., Tierno, D., Datta, S., Jourdan, N., Decoster, S., Wu, C., Mousa, M., Byun, Y., Struyf, H., Park, S., Tokei, Z. |
| المصدر: | 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) Advanced Metallization Conference (MAM)(IITC/MAM), 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for. :1-3 May, 2023 |
| Relation: | 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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