Deep Learning-Based Virtual Metrology in Multivariate Time Series

التفاصيل البيبلوغرافية
العنوان: Deep Learning-Based Virtual Metrology in Multivariate Time Series
المؤلفون: Han, Siho, Min, Jihwan, Ma, Jui, Hwang, Gyuil, Heo, Taeyeong, Kim, Young Eun, Kang, Sungjin, Kim, Hyojun, Park, Sangjong, Sung, Kisuk
المصدر: 2023 IEEE International Conference on Prognostics and Health Management (ICPHM) Prognostics and Health Management (ICPHM), 2023 IEEE International Conference on. :30-37 Jun, 2023
Relation: 2023 IEEE International Conference on Prognostics and Health Management (ICPHM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350346251
تدمد:21665656
DOI:10.1109/ICPHM57936.2023.10194015