دورية أكاديمية

Improved Performance of MoS2 Negative-Capacitance Field-Effect Transistors With Hf1–xLaxOyNz as Gate Dielectric by Optimizing La Content and Anneal Temperature Plus NH3-Plasma Treatment

التفاصيل البيبلوغرافية
العنوان: Improved Performance of MoS2 Negative-Capacitance Field-Effect Transistors With Hf1–xLaxOyNz as Gate Dielectric by Optimizing La Content and Anneal Temperature Plus NH3-Plasma Treatment
المؤلفون: Tian, Y., Liu, L., Jiang, W., Xu, J.
المصدر: IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 70(10):5408-5414 Oct, 2023
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
تدمد:00189383
15579646
DOI:10.1109/TED.2023.3299914