Rapid thermal annealing of NTD Si

التفاصيل البيبلوغرافية
العنوان: Rapid thermal annealing of NTD Si
المؤلفون: Li Mo, Karmar, T., Alexiev, D., Butcher, K.S.A.
المصدر: COMMAD 2000 Proceedings. Conference on Optoelectronic and Microelectronic Materials and Devices Optoelectronic and microelectronic materials and devices Optoelectronic and Microelectronic Materials and Devices, 2000. COMMAD 2000. Proceedings Conference on. :411-414 2000
Relation: COMMAD 2000 Proceedings. Conference on Optoelectronic amd Microelectronic Materials and Devices
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780366980
9780780366985
DOI:10.1109/COMMAD.2000.1022977