Ultra-Low Loss Silicon Nitride Waveguides on Monolithic Integrated Photonics Circuits for a Mature 300 mm Wafer Scale Silicon Photonics Platform

التفاصيل البيبلوغرافية
العنوان: Ultra-Low Loss Silicon Nitride Waveguides on Monolithic Integrated Photonics Circuits for a Mature 300 mm Wafer Scale Silicon Photonics Platform
المؤلفون: Timalsina, Yukta P., Leake, Gerald, Ngai, Tat, Antohe, Alin, Binti, Siti K., Baiocco, Christopher, Fahrenkopf, Nicholas M., Harame, David
المصدر: 2023 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2023 Conference on. :1-2 May, 2023
Relation: 2023 Conference on Lasers and Electro-Optics (CLEO)
قاعدة البيانات: IEEE Xplore Digital Library