Implementation of an all-digital electrostatic micro-mirror controller

التفاصيل البيبلوغرافية
العنوان: Implementation of an all-digital electrostatic micro-mirror controller
المؤلفون: Portelli, Barnaby, Grech, Ivan, Micallef, Joseph, Farrugia, Russell, Casha, Owen, Gatt, Edward
المصدر: 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP), 2023 Symposium on. :1-4 May, 2023
Relation: 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350341317
تدمد:27681874
DOI:10.1109/DTIP58682.2023.10267937