دورية أكاديمية
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors
| العنوان: | Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors |
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| المؤلفون: | Rabih, A.A.S., Nabavi, S., Menard, M., Nabki, F. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 33(1):21-36 Feb, 2024 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2023.3341039 |