مؤتمر
SiN beam resonant pressure sensors with a novel structure
| العنوان: | SiN beam resonant pressure sensors with a novel structure |
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| المؤلفون: | Deyong Chen, Dafu Cui, Li Wang, Xiaotong Gao |
| المصدر: | Proceedings of IEEE Sensors Sensors 2002 Sensors, 2002. Proceedings of IEEE. 2:994-997 vol.2 2002 |
| Relation: | Proceedings of IEEE SENSORS 2002 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780374541 9780780374546 |
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| DOI: | 10.1109/ICSENS.2002.1037246 |