التفاصيل البيبلوغرافية
| العنوان: |
Impact of Grain Size on The Q-Factor of Poly-Crystalline Diamond Mems Resonators |
| المؤلفون: |
Huber, Dominik, Platz, Daniel, Gesing, Andre, Fulmek, Paul, Steinmuller-Nethl, Doris, Pfusterschmied, Georg, Schmid, Ulrich |
| المصدر: |
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :915-918 Jan, 2024 |
| Relation: |
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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