Dual-Axis Piezoelectric Mems Micromirror with Adjustable Aspect Ratio of Lissajous Patterns through Structure Design and Electrode Arrangement

التفاصيل البيبلوغرافية
العنوان:	Dual-Axis Piezoelectric Mems Micromirror with Adjustable Aspect Ratio of Lissajous Patterns through Structure Design and Electrode Arrangement
المؤلفون:	Lin, Po-Chun, Hsu, Chih-Chen, Yang, Hui-Ming, Lin, Hung-Yu, Chen, Si-Han, Fang, Weileun
المصدر:	2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :717-720 Jan, 2024
Relation:	2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات:	IEEE Xplore Digital Library