مؤتمر
On the Performance Enhancement of Piezoelectric MEMS Microphone Using S-Shape Slit Design
| العنوان: | On the Performance Enhancement of Piezoelectric MEMS Microphone Using S-Shape Slit Design |
|---|---|
| المؤلفون: | Hu, Zih-Song, Fang, Weileun |
| المصدر: | 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :947-950 Jan, 2024 |
| Relation: | 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9798350357929 |
|---|---|
| تدمد: | 21601968 |
| DOI: | 10.1109/MEMS58180.2024.10439531 |