Tunable Ultra-Small Monolithically-Rolled-up Capacitors by Piezoelectric Actuation

التفاصيل البيبلوغرافية
العنوان: Tunable Ultra-Small Monolithically-Rolled-up Capacitors by Piezoelectric Actuation
المؤلفون: Nguyen, Kristen, Yang, Zhendong, Wang, Allen, Wicker, Scott A., Li, Xiuling
المصدر: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :683-686 Jan, 2024
Relation: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library