دورية أكاديمية
Single-Crystalline Bulk Acoustic Wave Resonators Fabricated With AlN Film Grown by a Combination of PLD and MOCVD Methods
| العنوان: | Single-Crystalline Bulk Acoustic Wave Resonators Fabricated With AlN Film Grown by a Combination of PLD and MOCVD Methods |
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| المؤلفون: | Ouyang, P., Yi, X., Li, G. |
| المصدر: | IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 45(4):538-541 Apr, 2024 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 07413106 15580563 |
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| DOI: | 10.1109/LED.2024.3368433 |