Design Optimization of a Corrugated Piezoelectric MEMS Microphone applying Genetic Algorithms

التفاصيل البيبلوغرافية
العنوان: Design Optimization of a Corrugated Piezoelectric MEMS Microphone applying Genetic Algorithms
المؤلفون: Bosetti, Gabriele, Bretthauer, Christian, Bogner, Andreas, Krenzer, Michael, Gierl, Karolina, Heiss, Heinrich, Schrag, Gabriele
المصدر: 2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2024 25th International Conference on. :1-5 Apr, 2024
Relation: 2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350393637
تدمد:28338596
DOI:10.1109/EuroSimE60745.2024.10491462