التفاصيل البيبلوغرافية
العنوان: |
A Monolithic Integrated MEMS Acoustic Dyadic Sensor |
المؤلفون: |
Yang, Lingmeng, Zhu, Zhezheng, Chen, Wangnan, Ma, Xu, Ma, Lihao, Gao, Chengchen, Hao, Yilong, Yang, Zhenchuan |
المصدر: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :2113-2116 Jun, 2023 |
Relation: |
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
قاعدة البيانات: |
IEEE Xplore Digital Library |