A Monolithic Integrated MEMS Acoustic Dyadic Sensor

التفاصيل البيبلوغرافية
العنوان: A Monolithic Integrated MEMS Acoustic Dyadic Sensor
المؤلفون: Yang, Lingmeng, Zhu, Zhezheng, Chen, Wangnan, Ma, Xu, Ma, Lihao, Gao, Chengchen, Hao, Yilong, Yang, Zhenchuan
المصدر: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :2113-2116 Jun, 2023
Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784886864352
تدمد:21670021