Electrothermally Tunable Accelerometer with Small Tuning Voltage and Very Large Sensitivity Tuning Range

التفاصيل البيبلوغرافية
العنوان: Electrothermally Tunable Accelerometer with Small Tuning Voltage and Very Large Sensitivity Tuning Range
المؤلفون: Chuang, Yu-Chi, Lee, Yuan-Chieh, Chiu, Yi
المصدر: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :72-75 Jun, 2023
Relation: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784886864352
تدمد:21670021