Formation of SiO2 Bonding Interface using Perhydropolysilazane at Room Temperature

التفاصيل البيبلوغرافية
العنوان: Formation of SiO2 Bonding Interface using Perhydropolysilazane at Room Temperature
المؤلفون: Takeuchi, Kai, Nemoto, Daiki, Suga, Tadatomo, Higurashi, Eiji
المصدر: 2024 International Conference on Electronics Packaging (ICEP) Electronics Packaging (ICEP), 2024 International Conference on. :113-114 Apr, 2024
Relation: 2024 International Conference on Electronics Packaging (ICEP)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784991191176
DOI:10.23919/ICEP61562.2024.10535553