Optimization of Ag Thin Film Thickness with a Capping Layer for Ag-Ag Surface Activated Bonding

التفاصيل البيبلوغرافية
العنوان: Optimization of Ag Thin Film Thickness with a Capping Layer for Ag-Ag Surface Activated Bonding
المؤلفون: Cai, Yuanhao, Takeuchi, Kai, Uomoto, Miyuki, Shimatsu, Takehito, Higurashi, Eiji
المصدر: 2024 International Conference on Electronics Packaging (ICEP) Electronics Packaging (ICEP), 2024 International Conference on. :117-118 Apr, 2024
Relation: 2024 International Conference on Electronics Packaging (ICEP)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784991191176
DOI:10.23919/ICEP61562.2024.10535599