دورية أكاديمية
BEOL-Compatible Ferroelectric Capacitor of 5 nm Ultrathin HZO With High Remanent Polarization and Excellent Endurance
العنوان: | BEOL-Compatible Ferroelectric Capacitor of 5 nm Ultrathin HZO With High Remanent Polarization and Excellent Endurance |
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المؤلفون: | Teng, L., Huang, Y., Chang, S., Wang, S., Lin, Y., Chien, C. |
المصدر: | IEEE Transactions on Nanotechnology IEEE Trans. Nanotechnology Nanotechnology, IEEE Transactions on. 23:474-477 2024 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 1536125X 19410085 |
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DOI: | 10.1109/TNANO.2024.3407817 |