Monolithic integration of various-type III-V epitaxial structures on silicon-photonics platform using chip-on-wafer hydrophilic bonding process

التفاصيل البيبلوغرافية
العنوان: Monolithic integration of various-type III-V epitaxial structures on silicon-photonics platform using chip-on-wafer hydrophilic bonding process
المؤلفون: Kikuchi, Takehiko, Kurokawa, Munetaka, Fujiwara, Naoki, Inoue, Naoko, Mitarai, Takuya, Fujikata, Hidenari, Hiratani, Takuo, Nitta, Toshiyuki, Itoh, Yuhki, Watanabe, Tohma, Lee, Chang-Yong, Furuya, Akira, Horikawa, Tsuyoshi, Nishiyama, Nobuhiko, Yagi, Hideki
المصدر: 2024 IEEE Silicon Photonics Conference (SiPhotonics) Silicon Photonics Conference (SiPhotonics), 2024 IEEE. :1-2 Apr, 2024
Relation: 2024 IEEE Silicon Photonics Conference (SiPhotonics)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350394047
تدمد:1949209X
DOI:10.1109/SiPhotonics60897.2024.10543539