دورية أكاديمية
High performance of novel oxygen diffusion barrier materials for future high-density dynamic random access memory devices
العنوان: | High performance of novel oxygen diffusion barrier materials for future high-density dynamic random access memory devices |
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المؤلفون: | Dong-Soo Yoon, Jae Sung Roh |
المصدر: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 49(11):1917-1927 Nov, 2002 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 00189383 15579646 |
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DOI: | 10.1109/TED.2002.804710 |