مؤتمر
An assessment of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM): for foundry manufacturing line of multiple-product mixed-run
العنوان: | An assessment of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM): for foundry manufacturing line of multiple-product mixed-run |
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المؤلفون: | Doong, K.Y.-Y., Hsieh, S., Lin, S.C., Hung, L.J., Wang, R.J., Binson Shen, Hisa, J.W., Guo, J.C., Chen, I.C., Young, K.L., Hsu, C.C.-H. |
المصدر: | Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Microelectronic test structures Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on. :55-59 2002 |
Relation: | ICMTS 2002. Proceedings of the 2002 International Conference on Microelectronic Test Structures |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780374649 9780780374645 |
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DOI: | 10.1109/ICMTS.2002.1193171 |