مؤتمر
An assessment of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM): for foundry manufacturing line of multiple-product mixed-run
| العنوان: | An assessment of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM): for foundry manufacturing line of multiple-product mixed-run |
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| المؤلفون: | Doong, K.Y.-Y., Hsieh, S., Lin, S.C., Hung, L.J., Wang, R.J., Binson Shen, Hisa, J.W., Guo, J.C., Chen, I.C., Young, K.L., Hsu, C.C.-H. |
| المصدر: | Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Microelectronic test structures Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on. :55-59 2002 |
| Relation: | ICMTS 2002. Proceedings of the 2002 International Conference on Microelectronic Test Structures |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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