مؤتمر
Piezoactuator-integrated monolithic microstage with six degrees of freedom
| العنوان: | Piezoactuator-integrated monolithic microstage with six degrees of freedom |
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| المؤلفون: | De-Yuan Zhang, Ono, T., Esashi, M. |
| المصدر: | TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Solid-state sensors, actuators and microsystems TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. 2:1518-1521 vol.2 2003 |
| Relation: | IEEE International Solid-State Sensors and Actuators Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780377311 9780780377318 |
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| DOI: | 10.1109/SENSOR.2003.1217066 |