مؤتمر
Electrical stability of the organic-inorganic material with low-k dielectric constant deposited by ICPCVD method
العنوان: | Electrical stability of the organic-inorganic material with low-k dielectric constant deposited by ICPCVD method |
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المؤلفون: | Oh, K.S., Choi, C.K. |
المصدر: | The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. Plasma science Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on. :409 2003 |
Relation: | 30th International Conference on Plasma Science |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 078037911X 9780780379114 |
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تدمد: | 07309244 |
DOI: | 10.1109/PLASMA.2003.1229959 |