مؤتمر
RTP of titanium boride for applications in front end processing
| العنوان: | RTP of titanium boride for applications in front end processing |
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| المؤلفون: | Zagozdzon-Wosik, W., Ranjit, R., Rusakova, I., van der Heide, P., Zhang, Z., Bennett, J. |
| المصدر: | 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors. RTP 2003 Advanced thermal processing of semiconductors Advanced Thermal Processing of Semiconductors, 2003. RTP 2003. 11th IEEE International Conference on. :209-213 2003 |
| Relation: | International Conference on Advanced Thermal Processing of Semiconductors |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780378741 9780780378742 |
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| DOI: | 10.1109/RTP.2003.1249150 |