مؤتمر
Low energy ion implantation into SOI substrates
| العنوان: | Low energy ion implantation into SOI substrates |
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| المؤلفون: | Kirkwood, D., Murrell, A., Collart, E., Banks, P., Fontaniere, R., Maleville, C. |
| المصدر: | Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on Ion implantation technology proceedings Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on. :633-636 2002 |
| Relation: | Proceedings of the 2002 14th International Conference on Ion Implantation Technology |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780371550 9780780371552 |
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| DOI: | 10.1109/IIT.2002.1258085 |