التفاصيل البيبلوغرافية
| العنوان: |
Selective and blanket tungsten interconnection and its suitability for 0.2-micron ULSI |
| المؤلفون: |
Ohba, T., Shirasaki, M., Misawa, N., Suzuki, T., Hara, T., Furumura, Y. |
| المصدر: |
Seventh International IEEE Conference on VLSI Multilevel Interconnection VLSI Multilevel Interconnection Conference, 1990. Proceedings., Seventh International IEEE. :226-232 1990 |
| Relation: |
Seventh International IEEE Conference on VLSI Multilevel Interconnection |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
