مؤتمر
Thin relaxed SiGe layers for strained Si CMOS
العنوان: | Thin relaxed SiGe layers for strained Si CMOS |
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المؤلفون: | Chen, P.S., Lee, S.W., Lee, M.H., Liu, C.W., Tsai, M.-J. |
المصدر: | 2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) Semiconductor manufacturing technology Semiconductor Manufacturing Technology Workshop Proceedings, 2004. :79-82 2004 |
Relation: | 2004 Semiconductor Manufacturing Technology Workshop Proceedings |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780384695 9780780384699 |
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DOI: | 10.1109/SMTW.2004.1393727 |