مؤتمر
ECR-plasma equipment application for nanotechnology
العنوان: | ECR-plasma equipment application for nanotechnology |
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المؤلفون: | Shapoval, S., Borodin, V., Gorbunov, V., Veretennikov, A. |
المصدر: | Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. Solid-state and integrated circuits technology Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on. 1:571-574 vol.1 2004 |
Relation: | 2004 7th International Conference on Solid-State and Integrated Circuits Technology Proceedings |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 078038511X 9780780385115 |
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DOI: | 10.1109/ICSICT.2004.1435071 |