مؤتمر
ECR-plasma equipment application for nanotechnology
| العنوان: | ECR-plasma equipment application for nanotechnology |
|---|---|
| المؤلفون: | Shapoval, S., Borodin, V., Gorbunov, V., Veretennikov, A. |
| المصدر: | Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. Solid-state and integrated circuits technology Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on. 1:571-574 vol.1 2004 |
| Relation: | 2004 7th International Conference on Solid-State and Integrated Circuits Technology Proceedings |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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