مؤتمر
A self-packaged thermal flow sensor by CMOS MEMS technology
| العنوان: | A self-packaged thermal flow sensor by CMOS MEMS technology |
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| المؤلفون: | Dong-hui Gao, Ming Qin, Hai-yang Chen, Qing-an Huang |
| المصدر: | Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. Solid-state and integrated circuits technology Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on. 3:1715-1718 vol.3 2004 |
| Relation: | 2004 7th International Conference on Solid-State and Integrated Circuits Technology Proceedings |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 078038511X 9780780385115 |
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| DOI: | 10.1109/ICSICT.2004.1435163 |