مؤتمر
Reliability of non-released microstructures: failure analysis and innovative solution process
| العنوان: | Reliability of non-released microstructures: failure analysis and innovative solution process |
|---|---|
| المؤلفون: | Millet, O., Muller, P., Blanrue, O., Legrand, B., Collard, D., Buchaillot, L. |
| المصدر: | The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Solid-State Sensors, Actuators and Microsystems Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on. 1:840-842 Vol. 1 2005 |
| Relation: | TRANSDUCERS '05. The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780389948 9780780389946 |
|---|---|
| تدمد: | 2159547X 21641641 |
| DOI: | 10.1109/SENSOR.2005.1496548 |