دورية أكاديمية
Interconnect capacitance characterization using charge-injection-induced error-free (CIEF) charge-based capacitance measurement (CBCM)
العنوان: | Interconnect capacitance characterization using charge-injection-induced error-free (CIEF) charge-based capacitance measurement (CBCM) |
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المؤلفون: | Yao-Wen Chang, Hsin-Wen Chang, Tao-Cheng Lu, Ya-Chin King, Wenchi Ting, Ku, J., Chih-Yuan Lu |
المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 19(1):50-56 Feb, 2006 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 08946507 15582345 |
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DOI: | 10.1109/TSM.2005.863228 |