دورية أكاديمية

Interconnect capacitance characterization using charge-injection-induced error-free (CIEF) charge-based capacitance measurement (CBCM)

التفاصيل البيبلوغرافية
العنوان: Interconnect capacitance characterization using charge-injection-induced error-free (CIEF) charge-based capacitance measurement (CBCM)
المؤلفون: Yao-Wen Chang, Hsin-Wen Chang, Tao-Cheng Lu, Ya-Chin King, Wenchi Ting, Ku, J., Chih-Yuan Lu
المصدر: IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 19(1):50-56 Feb, 2006
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
تدمد:08946507
15582345
DOI:10.1109/TSM.2005.863228