High performance single grain si tfts inside a location-controlled grain by /spl mu/-czochralski process with capping layer

التفاصيل البيبلوغرافية
العنوان: High performance single grain si tfts inside a location-controlled grain by /spl mu/-czochralski process with capping layer
المؤلفون: Vikas, R., Ishihara, R., Hiroshima, Y., Abe, D., Inoue, S., Shimoda, T., Metselaar, J.W., Beenakker, C.I.M.
المصدر: IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. International Electron Devices Meeting 2005 Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International. :919-922 2005
Relation: International Electron Devices Meeting 2005
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:078039268X
9780780392687
تدمد:01631918
2156017X
DOI:10.1109/IEDM.2005.1609509